منابع مشابه
Review of the mathematical foundations of data fusion techniques in surface metrology
The recent proliferation of engineered surfaces, including freeform and structured surfaces, is challenging current metrology techniques. Measurement using multiple sensors has been proposed to achieve enhanced benefits, mainly in terms of spatial frequency bandwidth, which a single sensor cannot provide. When using data from different sensors, a process of data fusion is required and there is ...
متن کاملApplications of Morphological Operations in Surface Metrology and Dimensional Metrology
In contrast to the widely used mean-line based evaluation techniques, the capabilities of morphological methods are not fully recognized in practice. Morphological operations, e.g. dilation, erosion, closing and opening, are useful tools in surface metrology and dimensional metrology. This paper presents a variety of novel applications of morphological operations in association with several of ...
متن کاملEffect of Periodic Virtual Metrology Recalibration on Blended Metrology Schemes
Risk and cost must be balanced in the design of semiconductor processing metrology. More specifically, one needs to balance the cost of operating the metrology tool, and the loss in terms of processing cost and yield due to the limited sampling and the time lapse between the occurrence and the correction of a process fault. In virtual metrology (VM), the real-time data produced by the processin...
متن کاملComputational Metrology
Coordinate measuring systems (CMSs) assess length-based characteristics of mechanical parts by measuring points on the part surface and analyzing the point data. Data analysis software can contribute significantly to the total measurement error of a CMS. Factors affecting software performance include the choice of analysis method, the quality of the software, and characteristics of the specific...
متن کاملSurface metrology
Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite to measurement. It is revealed that, as the push towards mini...
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ژورنال
عنوان ژورنال: Journal of Research of the National Bureau of Standards
سال: 1981
ISSN: 0160-1741
DOI: 10.6028/jres.086.010